- Date Created
- 2023-12-27 20:28:22
- Last Updated
- 2023-12-27 20:28:22
- UUID
- c97ac5f2-f812-4dbe-9898-8d11b42323a4
Title Update Infos: Materials for Microlithography : Radiation-Sensitive Polymers
- Package Update Info
- ACS Publications Master File
- Description
- Changes in Title 'Materials for Microlithography : Radiation-Sensitive Polymers'
- Status
- Successful
- Type
- Changed Title
- Start Time
- 2023-12-27
- End Time
- 2023-12-27
- KBART Field
- access_type
- Old Value
- Paid
- New value
- Free