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Title
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Materials for Microlithography : Radiation-Sensitive Polymers
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Package
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ACS Publications Master File
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Platform
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ACS Publications
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URL
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https://pubs.acs.org/doi/book/10.1021/bk-1984-0266
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Status
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Current
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Publication Type
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Monograph
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Medium
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Empty
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Language
-
-
First Author
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Empty
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First Editor
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Thompson
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Publisher Name
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American Chemical Society
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Date First in Print
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1985-07-01
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Date First Online
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2009-07-23
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Access Start Date
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Empty
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Access End Date
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Empty
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Volume Number
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266
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Edition Statement
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Empty
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Access Type
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Paid
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Note
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Empty
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Last Changed External
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Empty
- Date Created
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2021-09-07 14:36:09
- Last Updated
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2024-06-29 20:36:27
- UUID
-
c16e5ca1-350b-4fe9-8e7d-a7f4db784528
| Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
|
eISBN
|
eisbn
|
9780841210943
|
|
ISBN
|
isbn
|
9780841208711
|
|
Title_ID
|
title_id
|
10.1021/bk-1984-0266
|
| Dewey Decimal Classification |
-
Series
-
Empty
-
Parent publication title ID
-
symposium
-
Superseding publication title ID
-
Empty
-
Preceding publication title ID
-
Empty
| Price Type |
Value |
Currency |