-
Title
-
Materials and Processes for Next Generation Lithography
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Package
-
eBook - Freedom Collection Books and Backlist
-
Platform
-
ScienceDirect
-
URL
-
https://www.sciencedirect.com/science/bookseries/18762778/11
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Status
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Current
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Publication Type
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Monograph
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Medium
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Book
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Language
-
-
First Author
-
Empty
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First Editor
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"Alex Robinson, Richard Lawson"
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Publisher Name
-
Elsevier
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Date First in Print
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2016-01-01
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Date First Online
-
2016-11-08
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Access Start Date
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2010-03-26
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Access End Date
-
Empty
-
Volume Number
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11
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Edition Statement
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Empty
-
Access Type
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Paid
-
Note
-
Empty
-
Last Changed External
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2022-03-16
- Date Created
-
2022-03-17 12:17:07
- Last Updated
-
2023-07-24 13:36:58
- UUID
-
99229d31-91e5-4cfd-ae9c-8f31a22a7baa
| Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
|
DOI
|
doi
|
10.1016/C2014-0-03651-9
|
|
eISBN
|
eisbn
|
978-0-08-100354-1
|
|
Title_ID
|
title_id
|
9780081003541
|
-
Subject Area
-
Materials Science
| Dewey Decimal Classification |
-
Series
-
Empty
-
Parent publication title ID
-
18762778
-
Superseding publication title ID
-
Empty
-
Preceding publication title ID
-
Empty
| Price Type |
Value |
Currency |
| list |
175.0 |
EUR |