- Date Created
- 2022-03-17 12:17:07
- Last Updated
- 2022-03-17 12:17:07
- UUID
- e1bf1c98-f550-48f2-ae52-6fd7b829ab7c
Identifier: 10.1016/C2014-0-03651-9
- Identifier Namespace
- doi
- Identifier
- 10.1016/C2014-0-03651-9
Identified Components with same Identifier:
| Title | Package | Namespace |
|---|---|---|
| Materials and Processes for Next Generation Lithography (Current) | eBook - Freedom Collection Books and Backlist | doi |
| Materials and Processes for Next Generation Lithography (Current) | eBook - Freedom Collection Books 2023 and Backlist | doi |