- Date Created
- 2024-08-30 09:35:26
- Last Updated
- 2024-08-30 09:35:26
- UUID
- 887e1660-0d88-4c84-929f-ce62777f7aa4
Title Update Infos: Atomic Layer Processing - Semiconductor Dry Etching Technology
- Package Update Info
- Wiley UBCM Full Collection
- Description
- Changes in Title 'Atomic Layer Processing - Semiconductor Dry Etching Technology'
- Status
- Successful
- Type
- Changed Title
- Start Time
- 2024-08-30
- End Time
- 2024-08-30
- KBART Field
- last_changed
- Old Value
- 2021-07-16
- New value
- 2024-08-16