- Date Created
- 2022-08-28 15:57:52
- Last Updated
- 2022-08-28 15:57:52
- UUID
- 2b0b5ad6-8c3c-4dd5-b7d1-5597f3218eba
Title Update Infos: Chemical Mechanical Polishing in Silicon Processing
- Package Update Info
- eBook - Focus: Mathematical Sciences [EBFCMATHSC]
- Description
- Changes in Title 'Chemical Mechanical Polishing in Silicon Processing'
- Status
- Successful
- Type
- Changed Title
- Start Time
- 2022-08-28
- End Time
- 2022-08-28
- KBART Field
- parent_publication_title_id
- Old Value
- Empty
- New value
- 00808784