-
Title
-
Plasma Processing for VLSI
-
Package
-
eBook - Focus: Engineering [EBFCENGG]
-
Platform
-
ScienceDirect
-
URL
-
https://www.sciencedirect.com/science/bookseries/07367031/8
-
Status
-
Current
-
Publication Type
-
Monograph
-
Medium
-
Empty
-
Language
-
-
First Author
-
Empty
-
First Editor
-
Norman G. Einspruch, Dale M. Brown
-
Publisher Name
-
Elsevier
-
Date First in Print
-
1984-01-01
-
Date First Online
-
2014-06-27
-
Access Start Date
-
Empty
-
Access End Date
-
Empty
-
Volume Number
-
8
-
Edition Statement
-
Empty
-
Access Type
-
Paid
-
Note
-
Empty
-
Last Changed External
-
Empty
- Date Created
-
2021-11-22 23:34:05
- Last Updated
-
2024-09-30 20:08:14
- UUID
-
40719c52-2c25-48f2-a7b3-8f3038c409c5
Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
eISBN
|
eisbn
|
978-0-12-234108-3
|
Title_ID
|
title_id
|
9780122341083
|
Dewey Decimal Classification |
-
Series
-
Empty
-
Parent publication title ID
-
07367031
-
Superseding publication title ID
-
Empty
-
Preceding publication title ID
-
Empty
Price Type |
Value |
Currency |