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Title
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Materials and Processes for Next Generation Lithography
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Package
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eBook - Materials Science 2016 [EBCMS16]
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Platform
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ScienceDirect
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URL
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https://www.sciencedirect.com/science/bookseries/18762778/11
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Status
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Current
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Publication Type
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Monograph
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Medium
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Empty
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Language
-
-
First Author
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Empty
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First Editor
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Alex Robinson, Richard Lawson
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Publisher Name
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Elsevier
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Date First in Print
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2016-01-01
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Date First Online
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2016-11-08
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Access Start Date
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Empty
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Access End Date
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Empty
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Volume Number
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11
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Edition Statement
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Empty
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Access Type
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Paid
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Note
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Empty
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Last Changed External
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Empty
- Date Created
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2021-11-22 22:39:17
- Last Updated
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2024-08-26 20:41:46
- UUID
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618e2d77-5ebd-4361-8380-214661b9eef4
Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
eISBN
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eisbn
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978-0-08-100354-1
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Title_ID
|
title_id
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9780081003541
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Dewey Decimal Classification |
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Series
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Empty
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Parent publication title ID
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18762778
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Superseding publication title ID
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Empty
-
Preceding publication title ID
-
Empty
Price Type |
Value |
Currency |