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Title
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Lithography for VLSI
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Package
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eBook - Engineering (Legacy 1) [EBCEL1]
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Platform
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ScienceDirect
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URL
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https://www.sciencedirect.com/science/bookseries/07367031/16
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Status
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Current
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Publication Type
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Monograph
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Medium
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Empty
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Language
-
-
First Author
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Empty
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First Editor
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Norman G. Einspruch, R.K. Watts
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Publisher Name
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Elsevier
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Date First in Print
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1987-01-01
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Date First Online
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2014-06-27
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Access Start Date
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Empty
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Access End Date
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Empty
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Volume Number
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16
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Edition Statement
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Empty
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Access Type
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Paid
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Note
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Empty
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Last Changed External
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Empty
- Date Created
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2021-11-11 21:45:38
- Last Updated
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2024-07-01 20:04:49
- UUID
-
026e56f1-9df2-4ec6-9388-1b2d74bc7d93
| Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
|
eISBN
|
eisbn
|
978-0-12-234116-8
|
|
Title_ID
|
title_id
|
9780122341168
|
| Dewey Decimal Classification |
-
Series
-
Empty
-
Parent publication title ID
-
07367031
-
Superseding publication title ID
-
Empty
-
Preceding publication title ID
-
Empty
| Price Type |
Value |
Currency |