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Title
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Polymers for Microelectronics : Resists and Dielectrics
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Package
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ACS Publications Master File
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Platform
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ACS Publications
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URL
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https://pubs.acs.org/doi/book/10.1021/bk-1994-0537
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Status
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Current
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Publication Type
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Monograph
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Medium
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Empty
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Language
-
-
First Author
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Empty
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First Editor
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Thompson
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Publisher Name
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American Chemical Society
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Date First in Print
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1993-11-23
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Date First Online
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2009-07-23
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Access Start Date
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Empty
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Access End Date
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Empty
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Volume Number
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537
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Edition Statement
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Empty
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Access Type
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Paid
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Note
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Empty
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Last Changed External
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Empty
- Date Created
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2021-09-07 14:37:56
- Last Updated
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2024-06-29 20:36:28
- UUID
-
4d6b2d90-742c-4cc1-88a6-00025ba462ef
Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
eISBN
|
eisbn
|
9780841213937
|
ISBN
|
isbn
|
9780841227217
|
Title_ID
|
title_id
|
10.1021/bk-1994-0537
|
Dewey Decimal Classification |
-
Series
-
Empty
-
Parent publication title ID
-
symposium
-
Superseding publication title ID
-
Empty
-
Preceding publication title ID
-
Empty
Price Type |
Value |
Currency |