Title: PVD for Microelectronics
- Title
- PVD for Microelectronics
- Platform
- ScienceDirect
- Status
- Current
- Publication Type
- Monograph
- Medium
- Book
- Language
-
English
- First Author
- Empty
- First Editor
- Ronald A. Powell, Stephen M. Rossnagel
- Publisher Name
- Elsevier
- Date First in Print
- 1999-01-01
- Date First Online
- 2007-10-11
- Access Start Date
- 2007-10-11
- Access End Date
- Empty
- Volume Number
- 26
- Edition Statement
- Empty
- Access Type
- Paid
- Note
- Empty
- Last Changed External
- 2024-03-13
- Date Created
- 2024-04-19 10:28:48
- Last Updated
- 2024-08-28 20:33:57
- UUID
- 216aac47-e90e-45a3-b122-dd7a0d67ddfe
Identifier Namespace Name | Identifier Namespace Value | Identifier |
---|---|---|
DOI | doi | 10.1016/S1079-4050(99)X8001-X |
eISBN | eisbn | 978-0-12-533026-8 |
Title_ID | title_id | 9780125330268 |
- Subject Area
- Materials Science
Dewey Decimal Classification |
---|
- Series
- Empty
- Parent publication title ID
- 10794050
- Superseding publication title ID
- Empty
- Preceding publication title ID
- Empty
- Open Access
- Empty
Price Type | Value | Currency |
---|---|---|
list | 224.0 | EUR |