-
Title
-
Modeling of Film Deposition for Microelectronic Applications
-
Package
-
eBook - Freedom Collection Books 2023 and Backlist
-
Platform
-
ScienceDirect
-
URL
-
https://www.sciencedirect.com/science/bookseries/10794050/22
-
Status
-
Current
-
Publication Type
-
Monograph
-
Medium
-
Book
-
Language
-
-
First Author
-
Empty
-
First Editor
-
Stephen Rossnagel
-
Publisher Name
-
Elsevier
-
Date First in Print
-
1996-01-01
-
Date First Online
-
2007-10-11
-
Access Start Date
-
2007-10-11
-
Access End Date
-
Empty
-
Volume Number
-
22
-
Edition Statement
-
Empty
-
Access Type
-
Paid
-
Note
-
Empty
-
Last Changed External
-
2024-03-13
- Date Created
-
2024-04-19 10:28:08
- Last Updated
-
2024-06-29 20:18:57
- UUID
-
83d47846-642b-413a-a063-4f495a3c2210
| Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
|
eISBN
|
eisbn
|
978-0-12-533022-0
|
|
Title_ID
|
title_id
|
9780125330220
|
-
Subject Area
-
Materials Science
| Dewey Decimal Classification |
-
Series
-
Empty
-
Parent publication title ID
-
10794050
-
Superseding publication title ID
-
Empty
-
Preceding publication title ID
-
Empty
| Price Type |
Value |
Currency |
| list |
226.0 |
EUR |