Title: Interlayer Dielectrics for Semiconductor Technologies
- Title
- Interlayer Dielectrics for Semiconductor Technologies
- Platform
- ScienceDirect
- Status
- Current
- Publication Type
- Monograph
- Medium
- Book
- Language
-
English
- First Author
- Empty
- First Editor
- S.P. Murarka, M. Eizenberg and A.K. Sinha
- Publisher Name
- Academic Press
- Date First in Print
- 2003-01-01
- Date First Online
- 2007-09-02
- Access Start Date
- 2007-09-02
- Access End Date
- Empty
- Volume Number
- Empty
- Edition Statement
- Empty
- Access Type
- Paid
- Note
- Empty
- Last Changed External
- 2024-03-13
- Date Created
- 2024-04-19 10:27:26
- Last Updated
- 2024-06-29 20:18:46
- UUID
- 8df72062-76e8-4283-ab06-1563243e5a15
Identifier Namespace Name | Identifier Namespace Value | Identifier |
---|---|---|
DOI | doi | 10.1016/B978-0-12-511221-5.X5000-4 |
eISBN | eisbn | 978-0-12-511221-5 |
Title_ID | title_id | 9780125112215 |
- Subject Area
- Engineering
Dewey Decimal Classification |
---|
- Series
- Empty
- Parent publication title ID
- Empty
- Superseding publication title ID
- Empty
- Preceding publication title ID
- Empty
- Open Access
- Empty
Price Type | Value | Currency |
---|---|---|
list | 250.0 | EUR |