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Title
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Lithography for VLSI
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Package
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eBook - Chemical Engineering (Legacy 2) [EBCCEL2]
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Platform
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ScienceDirect
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URL
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https://www.sciencedirect.com/science/bookseries/07367031/16
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Status
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Deleted
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Publication Type
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Monograph
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Medium
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Empty
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Language
-
-
First Author
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Empty
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First Editor
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Norman G. Einspruch, R.K. Watts
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Publisher Name
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Elsevier
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Date First in Print
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1987-01-01
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Date First Online
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2014-06-27
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Access Start Date
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Empty
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Access End Date
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Empty
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Volume Number
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16
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Edition Statement
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Empty
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Access Type
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Empty
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Note
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Empty
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Last Changed External
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Empty
- Date Created
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2023-08-27 20:28:26
- Last Updated
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2024-04-15 20:12:40
- UUID
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e0c05a81-b7ea-48db-872a-2b8b2b21a833
Identifier Namespace Name |
Identifier Namespace Value |
Identifier |
eISBN
|
eisbn
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978-0-12-234116-8
|
Title_ID
|
title_id
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9780122341168
|
Dewey Decimal Classification |
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Series
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Empty
-
Parent publication title ID
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07367031
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Superseding publication title ID
-
Empty
-
Preceding publication title ID
-
Empty
Price Type |
Value |
Currency |