Title: Handbook of Silicon Based MEMS Materials and Technologies

Title
Handbook of Silicon Based MEMS Materials and Technologies
Package
ProQuest_Ebook Central DDA
Platform
Ebook Central
URL
https://ebookcentral.proquest.com/lib/ebooksnrw/detail.action?docID=4003527 
Status
Current
Publication Type
Monograph
Medium
Book
Language
English
First Author
Tilli, Markku
First Editor
Empty
Publisher Name
Elsevier Science & Technology Books
Date First in Print
2015-10-30
Date First Online
2015-10-30
Access Start Date
Empty
Access End Date
Empty
Volume Number
Empty
Edition Statement
2
Access Type
Paid
Note
Empty
Last Changed External
2023-08-18

Curated By

Date Created
2023-04-28 16:11:30
Last Updated
2023-11-16 16:08:07
UUID
7a8a8571-cd0e-427a-b849-ba34779c5bed
Identifier Namespace Name Identifier Namespace Value Identifier
eISBN eisbn 9780323312233
ISBN isbn 9780323299657
Title_ID title_id 4003527
Subject Area
Engineering: Electrical; Engineering
Dewey Decimal Classification
Series
Micro and Nano Technologies Series
Parent publication title ID
Empty
Superseding publication title ID
Empty
Preceding publication title ID
Empty
Open Access
Empty
Price Type Value Currency
list 309.31 EUR
list 330.0 USD


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