Title: Chemical Mechanical Polishing in Silicon Processing
- Title
- Chemical Mechanical Polishing in Silicon Processing
- Platform
- ScienceDirect
- Status
- Deleted
- Publication Type
- Monograph
- Medium
- Empty
- Language
-
- First Author
- Empty
- First Editor
- R.K. Willardson, Eicke R. Weber
- Publisher Name
- Elsevier
- Date First in Print
- 1999-01-01
- Date First Online
- 2008-05-30
- Access Start Date
- Empty
- Access End Date
- Empty
- Volume Number
- 63
- Edition Statement
- Empty
- Access Type
- Empty
- Note
- Empty
- Last Changed External
- Empty
- Date Created
- 2022-10-01 20:27:25
- Last Updated
- 2022-11-14 14:25:15
- UUID
- b1e19cba-8539-4653-97b3-f4ac96b7e8f6
Identifier Namespace Name | Identifier Namespace Value | Identifier |
---|---|---|
eISBN | eisbn | 978-0-12-752172-5 |
Title_ID | title_id | 9780127521725 |
- Subject Area
- Empty
Dewey Decimal Classification |
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- Series
- Empty
- Parent publication title ID
- 00808784
- Superseding publication title ID
- Empty
- Preceding publication title ID
- Empty
- Open Access
- Empty
Price Type | Value | Currency |
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