- Date Created
- 2024-01-06 20:21:26
- Last Updated
- 2024-01-06 20:21:26
- UUID
- 9c2c3eed-8bdc-4967-94fb-8b9dc284575a
Identifier: F252
- Identifier Namespace
- title_id
- Identifier
- F252
Identified Components with same Identifier:
| Title | Package | Namespace |
|---|---|---|
| Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena (Current) | Applied Science & Technology Source | title_id |