- Date Created
- 2024-01-06 20:21:26
- Last Updated
- 2024-01-06 20:21:26
- UUID
- e00b06b7-862a-488b-9aff-4393a10f0bc9
Identifier: 0734-211X
- Identifier Namespace
- issn
- Identifier
- 0734-211X
Identified Components with same Identifier:
| Title | Package | Namespace |
|---|---|---|
| Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena (Current) | Applied Science & Technology Source | issn |
| Journal of vacuum science & technology / B (Current) | American Vacuum Society (AVS): Global | issn |
| Journal of vacuum science & technology / B (Current) | American Vacuum Society : Journals | issn |