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Changes in Title 'Handbook of Silicon Based MEMS Materials and Technologies'
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Handbook of Silicon Based MEMS Materials and Technologies
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Successful
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Changed Title
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first_author
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"Veikko Lindroos, Markku Tilli, Ari Lehto and Teruaki Motooka"
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Veikko Lindroos, Markku Tilli, Ari Lehto and Teruaki Motooka
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2023-07-24 13:38
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2023-07-24 13:38
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